Deposition of diamond-like carbon films with femtosecond KrF laser pulses

被引：0
|
作者：
Yao, DS [1 ]
Liu, JR
Wang, LG
Yu, CX
Zhan, RJ
机构：
[1] Univ Sci & Technol China, Dept Modern Phys, Anhua 230026, Peoples R China
[2] NW Inst Nucl Technol, Div 3, Xian 710024, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2000年 / 17卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7 eV and the microhardness of 40-56 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid is observed. The film microhardness is improved with the increase of ion kinetic energy of plasma plume from 300 to 600 eV. The characteristics of DLC film deposition with fs pulses is discussed.
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页码：540 / 541
页数：2
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