Improvement of average laser power and beam divergence of a high pulse repetition frequency excimer laser

被引：7
|
作者：
Uteza, O
Delaporte, P
Fontaine, B
Forestier, B
Sentis, M
Tassy, I
Truong, JP
机构：
[1] Univ Aix Marseille 1, CNRS, UMR 6594, Inst Rech Phenomenes Hors Equilibre, F-13288 Marseille 9, France
[2] Univ Aix Marseille 2, CNRS, UMR 6594, Inst Rech Phenomenes Hors Equilibre, F-13288 Marseille, France
来源：
APPLIED PHYSICS B-LASERS AND OPTICS | 1998年 / 66卷 / 01期
关键词：
D O I：
10.1007/s003400050353
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate that the insertion of ceramic acoustic dampers within an excimer laser cavity produces a large reduction in the amplitude of the residual pressure fluctuations, hence allowing a strong improvement of average laser power and beam divergence at high pulse repetition frequency. Moreover, this technological solution is easy to implement and economical.
引用
收藏
页码：31 / 37
页数：7
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