Micro field in MEMS actuators

被引：0
|
作者：
Cui, TH
Zhou, ZY
机构：
来源：
MHS '96 - PROCEEDINGS OF THE SEVENTH INTERNATIONAL SYMPOSIUM ON MICRO MACHINE AND HUMAN SCIENCE: TOWARD MICRO-MECHATRONICS IN 21ST CENTURY | 1996年
关键词：
D O I：
10.1109/MHS.1996.563409
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Micro field is a new basic concept which can be used to analyze the actuation mechanism of MEMS(Micro Electro Mechanical Systems) actuators. First, the basic concept of micro field and fundamental principle of micro Extended Rayleigh Wave field have been put forward. Then, the micro field has been used to analyze the intrinsic quality of two kinds of microactuators, which include a piezoelectric micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments.
引用
收藏
页码：105 / 109
页数：3
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