PMUT ARRAY DESIGN FOR A HANDWRITING INPUT SYSTEM

被引：0
|
作者：
Liao, Wenjun [1 ]
Ren, Tianling [1 ]
Yang, Yi [1 ]
Kong, Xiangming [1 ]
Zhu, Yiping [1 ]
Wang, Ligang [1 ]
Wang, Yufeng [1 ]
Miao, Gujin [1 ]
Liu, Litian [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The novel handwriting input system (HIS) has been designed with the ferroelectrics-based micro-acoustic array, which has been fabricated using silicon based micro-machining process. This array is composed of two acoustic dipoles. It can increase output acoustic power effectively while maintaining omni-direction.
引用
收藏
页码：639 / 642
页数：4
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