Nano- and micromachining of transparent materials using laser plasma soft X-Rays

被引：0
|
作者：
Makimura, Tetsuya [1 ]
Torii, Shuichi [1 ]
Niino, Hiroyuki [2 ]
Murakami, Kouichi [1 ]
机构：
[1] Univ Tsukuba, Inst Appl Phys, Tennodai 1-1-1, Tsukuba, Ibaraki 3058573, Japan
[2] Natl Inst Adv Ind Sci &Tech, Photon Res Inst, Tsukuba, Ibaraki 3058565, Japan
来源：
2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2 | 2009年
关键词：
laser plasma soft X-ray; silica glass; transparent meterials; nanomachining; micromachining;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Laser plasma soft X-rays were applied to fabricate nano- and microstructures on surfaces of transparent materials. The optimized X-ray optics and nano-ablation process of silica glass will be emphasized as key device and process
引用
收藏
页码：466 / +
页数：2
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