Structure and photoluminescence of hydrogenated amorphous carbon films produced by using aromatic hydrocarbon source

被引：0
|
作者：
Xu, J [1 ]
Ma, TF [1 ]
Li, W [1 ]
Wang, L [1 ]
Li, ZF [1 ]
Chen, KJ [1 ]
机构：
[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
来源：
AMORPHOUS AND NANOSTRUCTURED CARBON | 2000年 / 593卷
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The organic carbon source -xylene(C6H6-C2H4), was used to fabricate a-C:H films in plasma enhanced chemical vapor deposition system. The structures and bonding configurations were characterized and compared with that of conventional methane-based samples by using Fourier Transform Infrared spectroscopy and Raman scattering technique. Strong room temperature luminescence in blue-green light range was found and the PL feature was quite different from that of methane-based a-C:H films.
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页码：353 / 357
页数：5
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