Surface Analysis and Optical Properties of Cu-Doped ZnO Thin Films Deposited by Radio Frequency Magnetron Sputtering

被引:28
|
作者
Chen, Guo-Ju [1 ]
Jian, Sheng-Rui [1 ]
Juang, Jenh-Yih [2 ]
机构
[1] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 840, Taiwan
[2] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 300, Taiwan
来源
COATINGS | 2018年 / 8卷 / 08期
关键词
Cu-doped ZnO thin film; XRD; AFM; UV-Vis; surface energy; ATOMIC LAYER DEPOSITION; PHOTOLUMINESCENCE PROPERTIES; CONDUCTIVITY; WETTABILITY; EVOLUTION; DEVICES;
D O I
10.3390/coatings8080266
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, Cu-doped ZnO (CZO) thin films were grown on glass substrates by using the radio frequency magnetron sputtering technique. The effects of Cu doping on the structural, surface morphological, optical properties, and wettability behaviors of CZO thin films were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), UV-Visible spectroscopy, and contact angle measurement, respectively. The XRD results indicated that all CZO thin films were textured, having a preferential crystallographic orientation along the hexagonal wurtzite (002) axis. The average transmittance in the visible wavelength region was above 80% for all CZO thin films. The optical band gap of the CZO films decreased from 3.18 to 2.85 eV when the Cu-doping was increased from 2% to 10%. In addition, the water contact angle measurements were carried out to delineate the Cu-doping effects on the changes in the surface energy and wettability of the films.
引用
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页数:8
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