Novel high sensitivity accelerometer based on a microfiber loop resonator

被引：26
|
作者：
Hou, Changlun [1 ]
Wu, Yu [1 ,2 ]
Zeng, Xu [1 ]
Zhao, Shuangshuang [1 ]
Zhou, Qiaofen [1 ]
Yang, Guoguang [1 ]
机构：
[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
[2] Univ Elect Sci & Technol China, Minist Educ, Key Lab Broadband Opt Fiber Transmiss & Commun Ne, Chengdu 610054, Peoples R China
来源：
OPTICAL ENGINEERING | 2010年 / 49卷 / 01期
基金：
中国国家自然科学基金;
关键词：
optical accelerometer; micro-fiber loop; optical resonator; FABRICATION; NANOWIRES;
D O I：
10.1117/1.3294883
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An optical accelerometer with a bulk-micromachined silicon proof mass and a microfiber loop resonator (MLR) sensor was developed. The MLR was fixed on the surface of the cantilever beam. The proof mass and cantilever beam were fabricated with a two-mask process. An accelerometer with a range of +/- 20 g and output sensitivity 624.7 mV/g was fabricated. The design, simulation, fabrication, and preliminary results are presented. (C) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3294883]
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页数：6
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