New sectorized implantable microelectrode fabrication, packaging and ageing for neural sensing and stimulation

被引:0
|
作者
Bottausci, F. [1 ]
Baleras, F. [1 ]
Pudda, C. [1 ]
Cochet, M. [1 ]
Chabrol, C. [2 ]
Sauter-Starace, F. [2 ]
Oziat, J. [1 ]
Rovetta, M. [1 ]
Icard, B. [1 ]
Guiraud, D. [3 ]
Divoux, J. L. [4 ]
Malbert, C. H. [5 ]
Henry, C. [6 ]
Maubert, S. [1 ]
机构
[1] CEA Leti, DTBS, MINATEC Campus, F-38054 Grenoble, France
[2] CEA Grenoble, LETI, CLINATEC, MINATEC Campus, F-38054 Grenoble, France
[3] INRIA, LIRMM, F-34095 Montpellier 5, France
[4] Axonic, F-06224 Vallauris, France
[5] Inst Natl Agron Res, Aniscan Unit, F-35590 St Gilles, France
[6] Sorin Grp, F-92140 Clamart, France
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D O I
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中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
This paper describes the fabrication and the packaging of a flexible parylene-based multi-contact electrode embedded in a silicone-based cuff. This type of electrode is well suited for peripheral nerve recording and offers improved spatial selectivity. We conducted mechanical and electrical tests for assessing the reliability by using an accelerated lifetime protocol. Test structures made with platinum sandwiched with parylene C were designed. The accelerated lifetime soaking tests in phosphate buffered saline (PBS) solution at 67 degrees C showed a longer life time (approximatively 4.5 years) with a dehydration bake introduction in the process flow and a parylene thickness increase. A specific test bench was developed for the mechanical cycling and for evaluating the mechanical robustness of the thin film devices.
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页码:466 / 469
页数:4
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