Statistical theory to holographic and speckle metrology

被引:0
|
作者
Fang, Q
Chen, JB
机构
关键词
holographic and speckle metrology; statistical theory; accuracy analysis;
D O I
10.1117/12.263096
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, the basic view points and methods of statistical metrological theory to holographic and speckle metrology are reviewed As an example, the statistical theory is applied to quasi-heterodyne holographic interferometry. The results reveal the relation between fringe distribution and system parameters and the relation between measuring accuracy and system errors. From this example, it can be found that statistical metrological theory is superior that the conventional geometrical theory.
引用
收藏
页码:291 / 296
页数:4
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