The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

被引：5

作者：

Gusel'nikov, A. V. ^{[1
]}

Safronov, A. V. ^{[2
]}

Kurenya, A. G. ^{[1
]}

Arkhipov, V. E. ^{[1
]}

Bolgarin, S. G. ^{[2
]}

Ivanov, A. E. ^{[2
]}

Kvashnin, A. G. ^{[2
,3
]}

Okotrub, A. V. ^{[1
,3
,4
]}

机构：

[1] Russian Acad Sci, Nikolaev Inst Inorgan Chem, Siberian Branch, Novosibirsk 630090, Russia

[2] Russian Acad Sci, Siberian Branch, Inst Computat Technol, Novosibirsk 630090, Russia

[3] Novosibirsk State Univ, Novosibirsk 630090, Russia

[4] OOO Karsi, Novosibirsk 630055, Russia

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2018年 / 61卷 / 04期

关键词：

Automation - Data visualization - Carbon nanotubes;

D O I：

10.1134/S0020441218040206

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.

引用

页码：482 / 485

页数：4

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