Methods for Optical Shape Measurement and their Measurement Uncertainty

被引:14
|
作者
Pavlicek, Pavel [1 ]
Haeusler, Gerd [2 ]
机构
[1] Palacky Univ, Fac Sci, Reg Ctr Adv Technol & Mat, Joint Lab Opt, CR-77147 Olomouc, Czech Republic
[2] Univ Erlangen Nurnberg, Inst Opt Informat & Photon, D-91054 Erlangen, Germany
关键词
uncertainty relation; coherence noise; shot noise; measurement uncertainty; shape measurement; ROUGH SURFACES; COHERENCE;
D O I
10.1080/15599612.2014.942929
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
There is a wide spectrum of optical 3-D sensors based on only a few basic principles. We calculate the measurement uncertainty for several "paradigm" methods, by means of the Cramer-Rao lower bound. It turns out that when all other sources of noise are neglected, the shot noise becomes the ultimate limit of the measurement uncertainty and the measurement uncertainty can be traced back to a Heisenberg uncertainty product. Consequently, making one of the factors uncertain, the other factor will become more precise. The different methods vary only by the way how this "uncertainty" is generated.
引用
收藏
页码:292 / 303
页数:12
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