Luminance characterization of La3Ga5SiO14 thin films by sputtering deposition

被引:0
|
作者
Hu, Yi [1 ]
Wang, Feng-Wei [1 ]
Lin, Hur-Lon [1 ]
机构
[1] Tatung Univ, Dept Mat Engn, 40 Chungshan N Rd,3rd Sec, Taipei 104, Taiwan
来源
THERMEC 2006, PTS 1-5 | 2007年 / 539-543卷
关键词
thin films; crystallization; sputtering; annealing; luminescence;
D O I
10.4028/www.scientific.net/MSF.539-543.3514
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
La3Ga5SiO14 (LGS) thin films were grown on (200)-textured MgO buffer layer, which was deposited on the silicon wafer, by sputtering at 600 degrees C. These thin films were annealed and transformed form amorphous to the LGS crystalline phase with the heat treatment temperature higher than 1150 degrees C. It was found that the films with LGS crystalline phase showed luminescent characterization whereas the LGS sintered solids did not. The emission peak of the films was found to be 438 nm under the excited light of lambda ex=300nm. Effects of annealed temperature on the luminescent properties of the thin films are investigated. The relationship between the mechanism of luminescence and the crystalline structure of the LGS films are discussed.
引用
收藏
页码:3514 / +
页数:2
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