Flexible wide-range capacitive pressure sensor using micropore PE tape as template

被引:36
|
作者
Zhang, Qiang [1 ,2 ]
Jia, Wendan [1 ,2 ]
Ji, Chao [1 ,2 ]
Pei, Zhen [1 ,2 ]
Jing, Zhu [1 ,2 ]
Cheng, Yongqiang [1 ,2 ]
Zhang, Wendong [1 ,2 ]
Zhuo, Kai [1 ,2 ]
Ji, Jianlong [1 ,2 ]
Yuan, Zhongyun [1 ,2 ]
Sang, Shengbo [1 ,2 ]
机构
[1] Taiyuan Univ Technol, Minist Educ, Micro Nano Syst Res Ctr, Key Lab Adv Transducers & Intelligent Control Sys, Taiyuan 030024, Shanxi, Peoples R China
[2] Taiyuan Univ Technol, Coll Informat & Comp, Taiyuan 030024, Shanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
Ag@CNTs; silver nanowires; structured flexible pressure sensor; capacitive sensor; ELECTRONIC SKIN; WEARABLE PRESSURE; FILM; TRANSPARENT; STRAIN; SENSITIVITY;
D O I
10.1088/1361-665X/ab4ac6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Flexible pressure sensors based on capacitive induction have become a research hot-spot because of low energy consumption and excellent performance in recent years. In practical applications, a wide range of detection and low-cost mass-produced flexible pressure sensors are ideal. Herein, this paper presents a wide detection range capacitive pressure sensor based on a structured elastic electrode, which is low cost and can be mass-produced by a simple method of micropore PE tape molding. Test results show that the sensor's pressure detection range is 0-45 kPa. This is because the upper structure of the capacitive sensor is constantly changing when subjected to different external pressures, so that the contact area of the upper substrate of the sensor becomes larger and the distance between the upper and lower substrates becomes smaller. In addition, this capacitive pressure sensor exhibits low detection limit (<300 Pa), ultra-short response time (<50 ms) and high operational stability for repeated loading/unloading pressure cycles. The sensor owns excellent resolution and can distinguish language, and the sensor can be used to monitor pulse. Low-cost mass production and wide detection range of flexible capacitive pressure sensors lay the foundation for the development of electronic skin, contact inspection applications and wearable healthcare monitors.
引用
收藏
页数:8
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