Investigation on removal features of fixed abrasive diamond pellets based on elasticity tool

To obtain removal functions with high removal rate and stability in the polishing of hard and brittle material, an optical fabrication technology based on fixed abrasive diamond pellet (FADP) elasticity tool (ET) is designed. In this paper, we focus on the removal characteristics of ET, including removal profile, removal rate, stability of removal functions (RFs), and surface roughness. ET is analyzed theoretically about removal rate, stability, and fine surface adaptability. Modeling of the static influence function of ET based on finite element analysis (FEA) is proposed and fitted. A series of experiments are conducted to verify the effectiveness of the model. Within 640 min, the pellets could provide highly stable RFs with removal rate 1.71 mm(3)/min. In addition, the surface roughness about 43 nm is obtained.