Femtosecond laser machining of silica and transparent materials

被引：3
|
作者：
Babiy, M. Yu [1 ]
Golik, S. S. [1 ]
Kolesnikov, A. V. [1 ]
Bystrov, F. G. [1 ]
机构：
[1] Far Eastern State Univ, Vladivostok 690600, Russia
来源：
Development of Industrial Manufacturing | 2014年 / 525卷
关键词：
Femtosecond laser; ablation; silica ablation; laser micromachining; femtosecond machining; glass; nanoposition;
D O I：
10.4028/www.scientific.net/AMM.525.128
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
Recently, interest in the study of processes occurring in the optical breakdown on the surface of solid targets associated with the increasing number of practical applications of the laser spark, such as laser induced breakdown spectroscopy and micro-and nano-materials processing. One of the most important tasks - to reduce the diameter of the focal spot, because the size of the modifications directly related to it. However, it is not the only problem faced by the transition to sub-micron range modifications.
引用
收藏
页码：128 / 132
页数：5
相关论文
共 50 条
  • [1] Research on Ultrasonic Vibration Aided Femtosecond Laser Machining Process of Transparent Materials
    Dai, Yutang
    Liu, Bin
    Yin, Guanglin
    Li, Tao
    Karanja, Joseph Muna
    INTERNATIONAL SYMPOSIUM ON PHOTONICS AND OPTOELECTRONICS 2015, 2015, 9656
  • [2] Femtosecond Laser Ablation Properties of Transparent Materials: Impact of the laser process parameters on the machining throughput
    Matylitsky, V. V.
    Hendricks, F.
    Au, J. Aus Der
    FRONTIERS IN ULTRAFAST OPTICS: BIOMEDICAL, SCIENTIFIC, AND INDUSTRIAL APPLICATIONS XIII, 2013, 8611
  • [3] Femtosecond laser micromachining in transparent materials
    Rafael R. Gattass
    Eric Mazur
    Nature Photonics, 2008, 2 : 219 - 225
  • [4] Femtosecond laser micromachining in transparent materials
    Gattass, Rafael R.
    Mazur, Eric
    NATURE PHOTONICS, 2008, 2 (04) : 219 - 225
  • [5] Femtosecond Lasers for Machining of Transparent, Brittle Materials: Ablative vs. Non-Ablative Femtosecond Laser Processing
    Hendricks, F.
    Matylitsky, V. V.
    FRONTIERS IN ULTRAFAST OPTICS: BIOMEDICAL, SCIENTIFIC, AND INDUSTRIAL APPLICATIONS XVI, 2016, 9740
  • [6] Femtosecond laser fine machining of energetic materials
    Wang Wen-Ting
    Hu Bing
    Wang Ming-Wei
    ACTA PHYSICA SINICA, 2013, 62 (06)
  • [7] Cutting and machining energetic materials with a femtosecond laser
    Roeske, F
    Benterou, J
    Lee, R
    Roos, E
    PROPELLANTS EXPLOSIVES PYROTECHNICS, 2003, 28 (02) : 53 - 57
  • [8] Nanofabrication in transparent materials with a femtosecond pulse laser
    Shimotsuma, Yasuhiko
    Hirao, Kazuyuki
    Qiu, Jianrong
    Miura, Kiyotaka
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (6-7) : 646 - 656
  • [9] Nanostructuring of transparent materials with femtosecond laser pulses
    Korte, F
    Koch, J
    Nolte, S
    Fallnich, C
    Chichkov, BN
    ULTRAFAST PHENOMENA XIII, 2003, 71 : 666 - 668
  • [10] Joining of transparent materials by femtosecond laser pulses
    Watanabe, Wataru
    Onda, Satoshi
    Tamaki, Takayuki
    Itoh, Kazuyoshi
    COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS VII, 2007, 6460
12345