Preparation of PbSc0.5Ta0.5O3 ferroelectric thin films for infrared detection by pulsed laser deposition

被引：0
|
作者：
Murakami, S
Popovici, D
Satoh, K
Matsumoto, M
Noda, M
Okuyama, M
机构：
[1] Technol Res Inst Osaka Prefecture, Osaka 5941157, Japan
[2] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源：
SENSORS AND MATERIALS | 2004年 / 16卷 / 05期
关键词：
ferroelectric thin film; PbSc0.5Ta0.5O3; infrared sensor of dielectric bolometer mode;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Preferentially (222)-oriented PbSc0.5Ta0.5O3 (PST) thin films were prepared on Pt/Ti/ SiO2/Si substrates by pulsed laser deposition at a temperature as low as 400degreesC. Their ferroelectric properties were improved by postdeposition annealing at 500degreesC, where the polarization at zero electric field was 1.4,uC/cm(2). The temperature coefficient of the dielectric constant (TCD) was also improved to l.l%/K at 25degreesC, indicating that the PST thin film is a promising candidate material for use in an infrared image sensor of dielectric bolometer mode, which is based on the temperature dependence of the dielectric constant.
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页码：231 / 239
页数：9
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