Design and simulation of non-resonant 1-DOF drive mode and anchored 2-DOF sense mode gyroscope for implementation using UV-LIGA process

This paper presents the design and simulation of a 3-DOF (degree-of-freedom) MEMS gyroscope structure with 1-DOF drive mode and anchored 2-DOF sense mode, based on UV-LIGA technology. The 3-DOF system has the drive resonance located in the flat zone between the two sense resonances. It is an inherently robust structure and offers a high sense frequency band width and high gain without much scaling down the mass on which the sensing comb fingers are attached and it is also immune to process imperfections and environmental conditions. The design is optimized to be compatible with the UV-LIGA process, having 9 mu m thick nickel as structural layer. The electrostatic gap between the drive comb fingers is 4 mu m and sense comb fingers gap are 4 mu m/12 mu m. The damping effect is considered by assuming the flexures and the proof mass suspended about 6 mu m over the substrate. Accordingly, mask is designed in L-Edit software.