Full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers

被引：11

作者：

Egawa, Satoru ^{[1
]}

Owada, Shigeki ^{[2
,3
]}

Motoyama, Hiroto ^{[4
]}

Yamaguchi, Gota ^{[1
]}

Matsuzawa, Yusuke ^{[5
]}

Kume, Takehiro ^{[5
]}

Kubota, Yuya ^{[2
,3
]}

Tono, Kensuke ^{[2
,3
]}

Yabashi, Makina ^{[2
,3
]}

Ohashi, Haruhiko ^{[2
,3
]}

Mimura, Hidekazu ^{[1
]}

机构：

[1] Univ Tokyo, Grad Sch Engn, Dept Precis Engn, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan

[2] Japan Synchrotron Radiat Res Inst JASRI, 1-1-1 Kouto, Sayo, Hyogo 6795198, Japan

[3] RIKEN, SPring 8 Ctr, 1-1-1 Kouto, Sayo, Hyogo 6795198, Japan

[4] Univ Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan

[5] Natsume Opt Corp, Technol Ctr, 1200-29 Kawaji, Iida, Nagano 3992431, Japan

来源：

OPTICS EXPRESS | 2019年 / 27卷 / 23期

基金：

日本学术振兴会;

关键词：

EXTREME-ULTRAVIOLET; FEMTOSECOND; REFLECTION; OPERATION; COHERENT; LIGHT;

D O I：

10.1364/OE.27.033889

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We developed a full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers. The Wolter mirrors for a condenser and an objective were fabricated using an electroforming process with a precisely figured master mandrel. In the imaging system constructed at SACLA BL1, sub-micrometer spatial resolution was achieved at wavelengths of 10.3 and 3.4 nm. Single-shot bright-field images were acquired with a maximum illumination intensity of 7x10(14) W/cm(2). (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：33890 / 33898

页数：9

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