Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials

被引:114
|
作者
Ashkenasi, D [1 ]
Varel, H [1 ]
Rosenfeld, A [1 ]
Henz, S [1 ]
Herrmann, J [1 ]
Cambell, EEB [1 ]
机构
[1] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12474 Berlin, Germany
关键词
D O I
10.1063/1.120606
中图分类号
O59 [应用物理学];
学科分类号
摘要
Self-focusing of ps laser pulses (lambda=790 nm) due to the nonlinear Ken effect is shown to provide an easy and flexible method for producing bulk structures with dimensions on the order of 10 mu m without damaging the entrance or exit surfaces of the material. The depth at which damage occurs can be controlled by adjusting either the pulse energy or pulse length. A study of the dependence of structure depth on the square root of the laser power for a given pulse length provides a straightforward method for determining the nonlinear index of refraction (Ken coefficient),n(2). (C) 1998 American Institute of Physics.
引用
收藏
页码:1442 / 1444
页数:3
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