Mechatronic design of RF MEMS switches for communication applications

被引：0
|
作者：
Lai, YL [1 ]
Wen, YD [1 ]
机构：
[1] Natl Changhua Univ Educ, Dept Mechatron Engn, Changhua 500, Taiwan
来源：
2004 47TH MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL I, CONFERENCE PROCEEDINGS | 2004年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.
引用
收藏
页码：365 / 368
页数：4
相关论文
共 50 条
  • [1] RF MEMS switches - design and performance in wireless applications
    Rahman, Hamood Ur
    Babaei, Jafar
    Ramer, Rodica
    DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, PHOTONICS AND NANOTECHNOLOGY IV, 2008, 6800
  • [2] RF MEMS switches and applications (INVITED)
    Newman, HS
    40TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, 2002, : 111 - 115
  • [3] Miniature MEMS Switches for RF Applications
    Stefanini, Romain
    Chatras, Matthieu
    Blondy, Pierre
    Rebeiz, Gabriel M.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 20 (06) : 1324 - 1335
  • [4] Design of Series RF MEMS switches suitable for Reconfigurable Antenna applications
    George, Raji
    Kumar, C. R. S.
    Gangal, S. A.
    PROCEEDINGS OF 2017 IEEE INTERNATIONAL CONFERENCE ON CIRCUIT ,POWER AND COMPUTING TECHNOLOGIES (ICCPCT), 2017,
  • [5] Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches
    Percy, J. Joslin
    Kanthamani, S.
    MICROELECTRONICS JOURNAL, 2023, 139
  • [6] Advances In MEMS Switches For RF Test Applications
    Moran, Tamir
    Keimel, Chris
    Miller, Todd
    2016 46TH EUROPEAN MICROWAVE CONFERENCE (EUMC), 2016, : 1369 - 1372
  • [7] Advances In MEMS Switches For RF Test Applications
    Moran, Tamir
    Keimel, Chris
    Miller, Todd
    2016 11TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2016, : 440 - 443
  • [8] MEMS tunable capacitors and switches for RF applications
    Rijks, TGSM
    van Beek, JTM
    Steeneken, PG
    Ulenaers, MJE
    van Eerd, P
    Den Toonder, JMJ
    van Dijken, AR
    De Coster, J
    Puers, R
    Weekamp, JW
    Scheer, JM
    Jourdain, A
    Tilmans, HAC
    2004 24TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, VOLS 1 AND 2, 2004, : 49 - 56
  • [9] RF-MEMS switches with AlN dielectric and their applications
    Badia, Montserrat Fernandez-Bolanos
    Nicole, Pierre
    Ionescu, Adrian Mihai
    INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES, 2011, 3 (05) : 509 - 520
  • [10] Improving the time response of MEMS switches for RF applications
    El-Asmar, M.
    Hariri, Y.
    Domingue, F.
    Nerguizian, V.
    2006 CANADIAN CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING, VOLS 1-5, 2006, : 767 - +
12345