The effect of RF power on tribological properties of the diamond-like carbon films

被引：24
|
作者：
Choi, WS
Heo, J
Chung, I
Hong, B [1 ]
机构：
[1] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon 440746, South Korea
[2] Sungkyunkwan Univ, Ctr Adv Plasma Surface Technol, Suwon 440746, South Korea
来源：
THIN SOLID FILMS | 2005年 / 475卷 / 1-2期
关键词：
atomic force microscopy; diamond-like carbon; friction force microscopy; surface roughness; tribology;
D O I：
10.1016/j.tsf.2004.07.033
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
DLC thin films were prepared by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) method on silicon substrates using methane (CH4), hydrogen (H-2) and gas mixture. We have checked the influence of varying RF power on DLC film. The Raman spectroscopy shows the diamond-like carbon (DLC) amorphous structure of the films. AFM images show the surface roughness of the DLC film decrease with increasing RF power. Also, the friction coefficients were investigated by atomic force microscope (AFM) in triction force microscope (FFM) mode. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：287 / 290
页数：4
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