Design, Optimization, and Realization of a High Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer (vol 26, pg 859, 2017)

被引：0

作者：

Lu, Qianbo ^{[1
]}

Bai, Jian ^{[1
]}

Wang, Kaiwei ^{[1
]}

He, Sailing ^{[1
]}

机构：

[1] Zhejiang Univ, Coll Opt Sci & Engn, Hangzhou 310027, Peoples R China

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2021年 / 30卷 / 02期

关键词：

Accelerometers; Microelectromechanical systems; Design optimization;

D O I：

10.1109/JMEMS.2020.3048739

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In the above article [1], the content of this article remains untouched. Only Table III is rectified. The stiffness of the proposed MOEMS accelerometer listed in Table III should be half of that value, which is 0.56 N/m.

引用

页码：331 / 331

页数：1

共 2 条

[1] Design, Optimization, and Realization of a High-Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer
Lu, Qianbo
Bai, Jian
Wang, Kaiwei
He, Sailing
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2017, 26 (04) : 859 - 869
[2] Optimization of a compact layer of TiO2 via atomic-layer deposition for high-performance perovskite solar cells (Expression of Concern of Vol 1, Pg 1533, 2017)
Shalan, Ahmed Esmail
Narra, Sudhakar
Oshikiri, Tomoya
Ueno, Kosei
Shi, Xu
Wu, Hui-Ping
Elshanawany, Mahmoud M.
Diau, Eric Wei-Guang
Misawa, Hiroaki
SUSTAINABLE ENERGY & FUELS, 2023, 7 (24): : 5733 - 5733

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