Optimal coherent decompositions for radially symmetric optical systems

被引:6
|
作者
von Bunau, RM [1 ]
Pati, YC
Wang, YT
Pease, RFW
机构
[1] Carl Zeiss Lithos GMBH, Oberkochen, Germany
[2] Numerical Technol Inc, Sunnyvale, CA USA
[3] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
来源
关键词
D O I
10.1116/1.589657
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article, we discuss the application of the optimal coherent decompositions introduced by Pati and Kailath [J. Opt. Sec. Am. A 11, 2438 (1994)] to radially symmetric optical systems. We show that for such systems, both the point spread functions and the pupil functions corresponding to each term in the expansion are separable in polar coordinates. We derive analytical expressions for their angular dependence and an integral equation for the radial dependence. Our results reduce the task of computing optimal coherent decompositions from a two-dimensional integral eigenvalue problem to a one-dimensional one. (C) 1997 American Vacuum Society.
引用
收藏
页码:2412 / 2416
页数:5
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