Role of residual stress on phase transformations of Pb(Zr0.50Ti0.50)O3 thin films obtained from chemical route

被引：2

作者：

Lima, E. C. ^{[1
]}

Araujo, E. B. ^{[2
]}

机构：

[1] Univ Fed Tocantins, Porto Nacl, TO, Brazil

[2] UNESP Univ Estadual Paulista, Fac Engn Ilha Solteira, Dept Fis & Qum, Ilha Solteira, SP, Brazil

来源：

FERROELECTRICS | 2016年 / 499卷 / 01期

基金：

巴西圣保罗研究基金会;

关键词：

PZT thin films; phase transformation; residual stress; RAMAN-SPECTROSCOPY; DEPOSITION;

D O I：

10.1080/00150193.2016.1171651

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effects of heat treatment on the phase transformations of lead zirconate titanate Pb(Zr0.50Ti0.50)O-3 (PZT) thin films were studied. The pyrolysis temperature directly affected the densification, residual stresses, and suppression of the pyrochlore phase observed in the studied films. The evolution of the crystalline phases and the residual stress were characterized by different temperatures of pyrolysis in PZT thin films, using the X-ray diffraction technique. The phase transformations in the films are discussed in terms of theoretical and experimental calculations of residual stress.

引用

页码：28 / 35

页数：8

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