Design and Analysis of Compliant Symmetrical Micro-Displacement Amplification Mechanism

The compliant micro-displacement mechanisms are increasingly used in the micro-electro-mechanical systems (MEMS) to transfer an input to output for achieving an amplified displacement. A compliant symmetrical micro-displacement amplification mechanism with flexure hinge is designed based on the amplification ratio and the micro-fabrication technologies. The deflection of the flexure hinges is analysed with the variable cross section method and the equation for calculating the equivalent rigidity of the flexure hinge is given. On the basis of the pseudo-rigid model, the mathematical model of force-displacement of the compliant symmetrical micro-displacement amplification mechanism is established which results in simplifying the calculations about the input, output displacement and amplification ratio of the mechanism. The mathematical calculations and the finite element simulation are performed simultaneously for the designed mechanism, the similar results are obtained which indicates the validity of the mathematical model and the feasibility of the design.