Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source

被引：0
|
作者：
Bussmann, J. [1 ,2 ]
Odstrcil, M. [1 ,3 ]
Bresenitz, R. [1 ,2 ]
Rudolf, D. [1 ,2 ]
Miao, J. [4 ,5 ]
Brocklesby, W. S. [3 ]
Juschkin, L. [1 ,2 ]
机构：
[1] Rhein Westfal TH Aachen, Expt Phys EUV, JARA FIT, Steinbachstr 15, D-52074 Aachen, Germany
[2] Forschungszentrum Julich, Peter Grunberg Inst PGI 9, JARA FIT, D-52425 Julich, Germany
[3] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England
[4] Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA
[5] Univ Calif Los Angeles, Calif Nano Syst Inst, Los Angeles, CA 90095 USA
来源：
X-RAY LASERS 2014 | 2016年 / 169卷
关键词：
RAY; RESOLUTION; MICROSCOPY;
D O I：
10.1007/978-3-319-19521-6_36
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrology.
引用
收藏
页码：275 / 280
页数：6
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