High-sensitivity and high-resolution low-energy ion scattering

被引：33

作者：

Brongersma, Hidde H. ^{[1
,2
,5
]}

Grehl, Thomas ^{[2
]}

van Hal, Paul A. ^{[4
]}

Kuijpers, Niels C. W. ^{[1
]}

Mathijssen, Simon G. J. ^{[4
]}

Schofield, Emma R. ^{[3
]}

Smith, Richard A. P. ^{[3
]}

ter Veen, Hendrik R. J. ^{[5
]}

机构：

[1] Calipso BV, NL-5600 MB Eindhoven, Netherlands

[2] ION TOF GmbH, D-48149 Munster, Germany

[3] Johnson Matthey Technol Ctr, Reading RG4 9NH, Berks, England

[4] Philips Res Labs, NL-5656 AE Eindhoven, Netherlands

[5] Tascon GmbH, D-48149 Munster, Germany

来源：

VACUUM | 2010年 / 84卷 / 08期

关键词：

LEIS; High sensitivity; Mass resolution; Depth resolution; Self-assembled monolayer; Quantitative; SURFACE-COMPOSITION;

D O I：

10.1016/j.vacuum.2009.11.016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Low-Energy Ion Scattering (LEIS or ISS) is used to selectively analyze the atomic composition of the outer atomic layer of surfaces. In addition, the spectrum gives (non-destructively) the in-depth distribution. Using a double toroidal energy analyzer with parallel energy detection and time-of-flight filtering a high sensitivity and mass resolution of LEIS is achieved. This is demonstrated for a highly dispersed catalyst of Pt/Au on gamma-alumina. The improved depth resolution is illustrated for self-assembled monolayers of alkanethiols (12-20 carbon atoms) on gold. Even for these low Z carbon atoms a clear shift of 8 eV/carbon atom is observed (using 1.5 keV (4)He(+) ion scattering). This opens many new possibilities for studies of ultra-thin diffusion barriers, high-k dielectrics and biosensors. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：1005 / 1007

页数：3

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