A high density FinFET one-time programmable cell with new intra-fin cell isolation for advanced system on chip applications

被引：1

作者：

Chen, Yu-Zheng ^{[1
]}

Yuan, Jo En ^{[1
]}

Peng, Ping Chun ^{[1
]}

Hsiao, Woan Yun ^{[1
]}

King, Ya-Chin ^{[1
]}

Lin, Chrong Jung ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Inst Elect Engn, Microelect Lab, Hsinchu 300, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 04期

关键词：

FUSE; ANTIFUSE; MEMORY; BREAKDOWN; CONTACT;

D O I：

10.7567/JJAP.55.04EE06

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A fully CMOS compatible one-time programmable (OTP) cell with a novel intra-fin cell isolation (IFCI) structure on a FinFET CMOS process has been proposed. The IFCI OTP cell utilizes the field-enhanced dielectric breakdown at fin corners to perform a fast and low-voltage program operation. Moreover, an ultrasmall intra-fin cell-to-cell isolation is firstly introduced to markedly shrink the cell size by eliminating the area-consuming spacing of fin-to-fin isolation. The IFCI FinFET OTP with fast program speed, excellent read disturb immunity, and reliable data retention is a promising solution for logic nonvolatile memory (NVM) technology in advanced CMOS nodes. (C) 2016 The Japan Society of Applied Physics

引用

页数：4

共 4 条

[1] High-Density FinFET One-Time Programmable Memory Cell With Intra-Fin-Cell-Isolation Technology
Peng, Ping Chun
Chen, Yu-Zheng
Hsiao, Woan Yun
Chen, Kuang-Hsin
Lin, Ching-Pin
Tien, Bor-Zen
Chang, Tzong-Sheng
Lin, Chrong Jung
King, Ya-Chin
IEEE ELECTRON DEVICE LETTERS, 2015, 36 (10) : 1037 - 1039
[2] A New High-Density Twin-Gate Isolation One-Time Programmable Memory Cell in Pure 28-nm CMOS Logic Process
Hsiao, Woan Yun
Peng, Ping Chun
Chang, Tzong-Sheng
Chih, Yu-Der
Tsai, Wu-Chin
Chang, Meng-Fan
Chien, Tun-Fei
King, Ya-Chin
Lin, Chrong-Jung
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2015, 62 (01) : 121 - 127
[3] A new 28 nm high-k metal gate CMOS logic one-time programmable memory cell
Hsiao, Woan Yun
Mei, Chin Yu
Shen, Wen Chao
Chih, Yue Der
King, Ya-Chin
Lin, Chrong Jung
JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (04)
[4] MAXIMIZATION OF RECOMBINANT PROTEIN YIELD IN THE INSECT-CELL BACULOVIRUS SYSTEM BY ONE-TIME ADDITION OF NUTRIENTS TO HIGH-DENSITY BATCH CULTURES
BEDARD, C
KAMEN, A
TOM, R
MASSIE, B
CYTOTECHNOLOGY, 1994, 15 (1-3) : 129 - 138

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