Semiconductor productivity challenges for the 21st century

被引：0

作者：

Polcari, Michael R. ^{[1
]}

机构：

[1] SEMATECH, Austin, TX 78741 USA

来源：

关键词：

D O I：

10.1109/VTSA.2007.378893

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：1 / 2

页数：2

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