Fabrication of diamond-coated germanium ATR prisms for IR-spectroscopy

被引:3
|
作者
Babchenko, O. [1 ]
Kozak, H. [1 ]
Izak, T. [1 ]
Stuchlik, J. [1 ]
Remes, Z. [1 ]
Rezek, B. [1 ]
Kromka, A. [1 ]
机构
[1] ASCR, Inst Phys, Vvi, Cukrovarnicka 10, Prague 16253 6, Czech Republic
关键词
Diamond; Low temperature growth; Linear antenna microwave plasma; Germanium; SEM; FTIR; NANOCRYSTALLINE DIAMOND; REFLECTANCE SPECTROSCOPY; WINDOW APPLICATIONS; THIN-FILMS; LARGE-AREA; TEMPERATURE; SILICON; GROWTH; PLASMA; NANOPARTICLES;
D O I
10.1016/j.vibspec.2016.03.002
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Monocrystalline germanium is considered a highly useful material for infrared optical applications due to its relatively low price, low toxicity and high optical transparency in the infrared spectral range (5500-870 cm(-1)). However, it is limited by its low chemical, mechanical, and thermal stability. The thin film diamond coating can provide a mechanical protection of a Ge surface against scratching, chemical protection against solutions, and make a well-defined hydrophilic/hydrophobic surface. Here, we compare low temperature (250-400 degrees C) diamond growth on Ge substrates and attenuated total reflection prisms, using a chemical vapor deposition in linear antenna microwave plasma and focused microwave plasma reactors. We show that by employing a thin amorphous silicon interlayer (20-30 nm), a homogeneous diamond coating with no degradation of the Ge surface is achieved. The infrared spectroscopy of proteins adsorbed on the diamond coated Ge prism demonstrates usability and advantages in comparison with bare Si or Ge prisms and even with the diamond-coated Si prism. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:67 / 73
页数:7
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