Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source

被引：9
|
作者：
Brooks, Nathan J. [1 ]
Bin Wang [1 ]
Binnie, Iona [1 ]
Tanksalvala, Michael [1 ]
Esashi, Yuka [1 ]
Knobloch, Joshua L. [1 ]
Nguyen, Quynh L. D. [1 ]
McBennett, Brendan [1 ]
Jenkins, Nicholas W. [1 ]
Gui, Guan [1 ]
Zhang, Zhe [2 ]
Kapteyn, Henry C. [1 ]
Murnane, Margaret M. [1 ]
Bevis, Charles S. [1 ,3 ]
机构：
[1] Univ Colorado, JILA, STROBE Sci & Technol Ctr, Boulder, CO 80309 USA
[2] Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, MOE Key Lab Adv Microstruct Mat, Shanghai 200092, Peoples R China
[3] Univ Pavia, Dept Phys, Lab Ultrafast Xray & Electron Microscopy, Via Agostino Bassi 6, I-27100 Pavia, PV, Italy
来源：
OPTICS EXPRESS | 2022年 / 30卷 / 17期
基金：
美国国家科学基金会;
关键词：
FIELD-OF-VIEW; NONLINEAR OPTICS; COHERENT; GENERATION; RADIATION;
D O I：
10.1364/OE.458955
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：30331 / 30346
页数：16
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