Stereovision system for 3-D measurement of MEMS components

被引：0
|
作者：
Liu, S [1 ]
Fu, JZ [1 ]
Liu, JH [1 ]
Ren, K [1 ]
Yang, HM [1 ]
Chen, ZC [1 ]
机构：
[1] Zhejiang Univ, Inst Prod Engn, Hangzhou, Peoples R China
来源：
PROCEEDINGS OF THE INTERNATIONAL SYMPOSIUM ON PRECISION MECHANICAL MEASUREMENT, VOL 4 | 2002年
关键词：
MEMS components; stereovision; micromanipulation; CCD;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The use of stereoscopic microscope with selective field-of-view improves the recognizability of 3D-shaped micro objects and provides a method for overcoming several essential limitations-in micromanipulation. An optical system was designed and it consists of a stereomicroscope and a CCD to obtain the stereo images of micro-mechanical part. These images are the input data for the following stereovision software module, from which the 3-D model of the micro object can be generated.
引用
收藏
页码：191 / 195
页数：5
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