Challenges in Silicon Photonics Process Technology

被引：0
|
作者：
Boeuf, Frederic [1 ]
Vulliet, Nathalie [1 ]
Baudot, Charles [1 ]
Messaoudene, Sonia [2 ]
Baylac, Elise [1 ]
Cremer, Sebastien [1 ]
机构：
[1] STMicroelectronics, Crolles, France
[2] CEA, LETI, Grenoble, France
来源：
43RD EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC 2017) | 2017年
关键词：
LASER;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper we discuss the specific challenges of process integration of Si-Photonics for the current and future applications, including lithography, etching and heterogeneous materials integration.
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页数：3
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