Room-Temperature Synthesis of Titanium Nitride Using Metastable Nitrogen

被引:4
|
作者
Anderson, Mark S. [1 ]
机构
[1] CALTECH, Jet Prop Lab, 4800 Oak Grove Dr, Pasadena, CA 91109 USA
基金
美国国家航空航天局;
关键词
titanium nitride; plasmonics; metastable nitrogen; surface-enhanced infrared; ENHANCED RAMAN-SPECTROSCOPY; OPEN-AIR; PLASMONICS; STATES;
D O I
10.3390/coatings12081177
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The room-temperature synthesis of titanium nitride (TiN) is presented using the reaction of metastable nitrogen (MSN) with a titanium metal surface. The MSN is generated in a nitrogen glow discharge with plasma-ion filtering using a commercial direct analysis in real time (DART) source. The MSN is flowed over a titanium substrate at ambient pressure producing TiN surfaces that are ultra-clean and suitable for plasmonic applications. This is demonstrated using surface-enhanced infrared absorption spectroscopy (SEIRA), producing a 100-fold signal enhancement. Nitriding using MSN could find general applications in producing nitrided surfaces with small-scale structures.
引用
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页数:6
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