Defect monitoring using scanning photoluminescence spectroscopy in multicrystalline silicon wafers

被引:66
|
作者
Ostapenko, S [1 ]
Tarasov, I
Kalejs, JP
Haessler, C
Reisner, EU
机构
[1] Univ S Florida, Ctr Microelect Res, Tampa, FL 33620 USA
[2] ASE Amer, Billerica, MA 01821 USA
[3] Bayer AG, D-47812 Krefeld, Germany
关键词
D O I
10.1088/0268-1242/15/8/310
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Scanning photoluminescence (PL) spectroscopy was performed on as-grown and processed multicrystalline silicon (mc-Si) wafers to investigate the defect distribution affecting the efficiency of solar cells. In highly inhomogeneous me-Si prepared by (i) edge-defined film-fed growth or (ii) a block-casting technique, regions of a wafer with enhanced recombination activity and reduced minority carrier lifetime exhibit an intensive 'defect' PL band at room temperature with the maximum at about 0.8 eV. By comparing PL mapping with the distribution of dislocations, we present experimental evidence that the 0.8 eV band corresponds to electrically active dislocation networks. This was confirmed using low-temperature PL spectroscopy, which revealed a characteristic quartet of the dislocation D-lines. One of these dislocation lines, D1. can be tracked as temperature increases and linked to the 'defect' band. Strong linear polarization of the 0.8 eV PL band corresponds to a preferential localization of defects in regions with a high level of elastic stress measured with scanning infrared polariscopy. The origin of the 0.8 eV PL band is attributed to dislocations contaminated with impurity precipitates.
引用
收藏
页码:840 / 848
页数:9
相关论文
共 50 条
  • [1] Defect diagnostics using scanning photoluminescence in multicrystalline silicon
    Tarasov, I
    Ostapenko, S
    Feifer, V
    McHugo, S
    Koveshnikov, SV
    Weber, J
    Haessler, C
    Reisner, EU
    PHYSICA B-CONDENSED MATTER, 1999, 273-4 : 549 - 552
  • [2] Defect monitoring using scanning photoluminescence spectroscopy in multycristalline silicon solar cell
    Tarasov, I
    Ostapenko, S
    Kalejs, JP
    CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000, 2000, : 112 - 115
  • [3] Defect characterization in multicrystalline silicon using scanning techniques
    Ostapenko, S
    Tarasov, I
    Kalejs, JP
    BEAM INJECTION ASSESSMENT OF MICROSTRUCTURES IN SEMICONDUCTORS, 2000, 2000, 78-79 : 259 - 266
  • [4] Defect diagnostics in multicrystalline silicon using scanning techniques
    Tarasova, I
    Ostapenko, S
    Seifert, W
    Kittler, M
    Kaleis, JP
    PHYSICA B-CONDENSED MATTER, 2001, 308 : 1133 - 1136
  • [5] IRON IMAGING IN MULTICRYSTALLINE SILICON WAFERS VIA PHOTOLUMINESCENCE
    Fan, Yang-Chieh
    Tan, Jason
    Sieu Pheng Phang
    Macdonald, Daniel
    35TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, 2010, : 439 - 442
  • [6] Analysis of intra-grain defects in multicrystalline silicon wafers by photoluminescence mapping and spectroscopy
    Sugimoto, Hiroki
    Inoue, Masaaki
    Tajima, Michio
    Ogura, Atsushi
    Ohshita, Yoshio
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (24-28): : L641 - L643
  • [7] Imaging crystal orientations in multicrystalline silicon wafers via photoluminescence
    Sio, H. C.
    Xiong, Z.
    Trupke, T.
    Macdonald, D.
    APPLIED PHYSICS LETTERS, 2012, 101 (08)
  • [8] Spectral and spatially resolved imaging of photoluminescence in multicrystalline silicon wafers
    Olsen, E.
    Flo, A. S.
    APPLIED PHYSICS LETTERS, 2011, 99 (01)
  • [9] Nondestructive Defect Characterization of Saw-Damage-Etched Multicrystalline Silicon Wafers Using Scanning Electron Acoustic Microscopy
    Meng, Lei
    Rao, Satyavolu S. Papa
    Bhatia, Charanjit S.
    Steen, Steven E.
    Street, Alan G.
    Phang, Jacob C. H.
    IEEE JOURNAL OF PHOTOVOLTAICS, 2013, 3 (01): : 370 - 374
  • [10] Nondestructive Defect Characterization of Saw-Damage-Etched Multicrystalline Silicon Wafers Using Scanning Electron Acoustic Microscopy
    Meng, Lei
    Rao, Satyavolu S. Papa
    Bhatia, Charanjit S.
    Steen, Steven E.
    Street, Alan G.
    Phang, Jacob C. H.
    2012 IEEE 38TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), VOL 2, 2013,