Electron ptychographic microscopy for three-dimensional imaging

被引：85

作者：

Gao, Si ^{[1
,2
]}

Wang, Peng ^{[1
,2
,3
]}

Zhang, Fucai ^{[4
,5
,6
]}

Martinez, Gerardo T. ^{[7
]}

Nellist, Peter D. ^{[7
]}

Pan, Xiaoqing ^{[1
,2
,8
,9
]}

Kirkland, Angus I. ^{[7
,10
]}

机构：

[1] Nanjing Univ, Natl Lab Solid State Microstruct, Coll Engn & Appl Sci, Collaborat Innovat Ctr Adv Microstruct, Nanjing 210093, Jiangsu, Peoples R China

[2] Nanjing Univ, Ctr Microstruct Quantum Mat, Nanjing 210093, Jiangsu, Peoples R China

[3] Nanjing Univ, Res Ctr Environm Nanotechnol, Nanjing 210093, Jiangsu, Peoples R China

[4] Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China

[5] London Ctr Nanotechnol, London WC1H 0AH, England

[6] Res Complex Harwell, Harwell Oxford Campus, Didcot OX11 0FA, Oxon, England

[7] Univ Oxford, Dept Mat, Parks Rd, Oxford OX1 3PH, England

[8] Univ Calif Irvine, Dept Chem Engn & Mat Sci, Irvine, CA 92697 USA

[9] Univ Calif Irvine, Dept Phys & Astron, Irvine, CA 92697 USA

[10] Electron Phys Sci Imaging Ctr, Diamond Lightsource, Diamond House, Didcot OX11 0DE, Oxon, England

来源：

NATURE COMMUNICATIONS | 2017年 / 8卷

基金：

英国工程与自然科学研究理事会; 对外科技合作项目（国际科技项目）; 中国国家自然科学基金;

关键词：

CARBON NANOTUBES; DELTA CORRECTOR; TOMOGRAPHY; RESOLUTION; CONTRAST; SCATTERING; ANGLE; VISUALIZATION; NANOCATALYSTS; CONVERGENCE;

D O I：

10.1038/s41467-017-00150-1

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Knowing the three-dimensional structural information of materials at the nanometer scale is essential to understanding complex material properties. Electron tomography retrieves three-dimensional structural information using a tilt series of two-dimensional images. In this paper, we report an alternative combination of electron ptychography with the inverse multislice method. We demonstrate depth sectioning of a nanostructured material into slices with 0.34 nm lateral resolution and with a corresponding depth resolution of about 24-30 nm. This three-dimensional imaging method has potential applications for the three-dimensional structure determination of a range of objects, ranging from inorganic nanostructures to biological macromolecules.

引用

页数：8

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