Properties of diamond-like carbon films synthesized by dual-target unbalanced magnetron sputtering

被引：0
|
作者：
Liu, C [1 ]
Li, GQ [1 ]
Gou, W [1 ]
Mu, ZX [1 ]
Zhang, ZX [1 ]
Zhang, CW [1 ]
机构：
[1] Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2004年 / 21卷 / 11期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Smooth, dense and uniform diamond-like carbon films (DLC films) for industrial applications have successfully been prepared by dual-target unbalanced magnetron sputtering and the DLC characteristics of the films are confirmed by Raman spectra. It is found that the sputtering current of target plays an important role in the DLC film deposition. Deposition rate of 3.5 mum/h is obtained by using the sputtering current of 30 A. The friction coefficient of the films is 0.2-0.225 measured by using a pin-on-disc microtribometer. The structure of the films tends to have a growth of sp(3) bonds content at high sputtering current. The compressive residual stress in the films increases with the increasing sputtering current of the target.
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页码：2249 / 2251
页数：3
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