The effect of various magnetic field configurations on a hollow-cathode discharge

A Monte Carlo model was used to describe the behaviour of electrons and ions in an argon hollow-cathode discharge under the influence of a transverse or longitudinal magnetic field. The model included calculating the energy distribution of electrons and ions, the electron excitation and ionization rate spatial distributions and the flux and density distribution of electrons and ions. Comparisons were made between these two kinds of magnetic field to primarily distinguish their effects on the hollow-cathode effect and the sputtering process. The results show that the applied magnetic fields influence the characteristics of discharge in the negative glow more efficiently than that in the cathode dark space, and the transverse magnetic field (parallel to the sheath electric field) is more suitable to enhance the hollow-cathode effect and sputtering process than the longitudinal one (parallel to the electrode).