Three-dimensional X-ray fluorescence imaging with confocal full-field X-ray microscope

被引：10

作者：

Takeuchi, Akihisa ^{[1
]}

Terada, Yasuko ^{[1
]}

Uesugi, Kentaro ^{[1
]}

Suzuki, Yoshio ^{[1
]}

机构：

[1] Japan Synchrotron Radiat Res Inst SPring 8, Sayo, Hyogo 6795198, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

Confocal X-ray microscope; Full-field X-ray microscope; X-ray fluorescence; Fresnel zone plate; WOLTER MIRROR; MICROTOMOGRAPHY; SYSTEM;

D O I：

10.1016/j.nima.2009.10.054

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A confocal full-field X-ray microscope was performed for three-dimensional X-ray fluorescence imaging with sub-micron spatial resolution. The system consists of an illumination system that produces a sheet-like shaped X-ray beam micrified only in one direction, and an X-ray full-field microscope whose optical axis is normal to the illuminating "sheet-beam". An arbitrary cross-sectional region of the object is irradiated by the sheet-beam, and X-ray fluorescence emission from this region is imaged simultaneously with the full-field microscope. Therefore, a virtual sliced image can be obtained with one-shot exposure, and three-dimensional observation is available only by a linear translation of the object. The experiment has been carried out at beamline 37XU of SPring-8. One-dimensional focusing total reflection mirror is used to produce the sheet-beam. Fresnel zone plate is used as the objective of the X-ray full-field microscope system. Charge-coupled device camera was used as an image detector. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：261 / 265

页数：5

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