Design and Implementation of Suspension Decoupling Controller for Multi-DOF Maglev Positioning Platform

被引：0
|
作者：
Yang, Yang [1 ]
Dai, Chunhui [1 ]
Zhang, Hehong [1 ]
Long, Zhiqiang [1 ]
机构：
[1] Natl Univ Def Technol, Coll Intelligent Sci, Changsha 410073, Hunan, Peoples R China
来源：
2019 CHINESE AUTOMATION CONGRESS (CAC2019) | 2019年
基金：
国家重点研发计划;
关键词：
maglev positioning platform; levitation controller; decoupling control; sliding mode variable structure control;
D O I：
10.1109/cac48633.2019.8996793
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Precision positioning platform is the key component of semiconductor lithography and precision manufacturing. In this paper, a multi-degree-of-freedom maglev precise positioning platform with a wide range of travel is studied, and the three-degree-of-freedom dynamic modeling and decoupling control of the platform suspension system are studied. The sliding mode variable structure control strategy is introduced to decouple the three-degree-of-freedom coupled system, and the extended state observer is introduced to observe the internal and external disturbances of the system. Using the the three-point levitation system in the laboratory, the control algorithm of the levitation controller of the positioning platform is designed and implemented. The specific experimental results are given and compared.
引用
收藏
页码：2324 / 2328
页数：5
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