An in situ method for diagnosing phase shifting interferometry

被引：1
|
作者：
Shao, J. [1 ,2 ]
Ma, D. [2 ]
Zhang, H. [2 ]
Xie, Y. [2 ]
机构：
[1] Qingdao Technol Univ, Coll Mech Engn, Jia Lingjiang Rd 777, Qingdao, Peoples R China
[2] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Dong Nanhu Rd 3888, Changchun, Peoples R China
来源：
JOURNAL OF INSTRUMENTATION | 2016年 / 11卷
关键词：
Interferometry; Optics; Real-time monitoring; POINT DIFFRACTION INTERFEROMETER; ERRORS;
D O I：
10.1088/1748-0221/11/05/P05018
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Current diagnosing phase shifting interferometry is a time and funds consuming process. Hence a brief and effective method is necessary to satisfy the real-time testing. In this paper, mathematical solutions for errors were deduced from the difference of intensity patterns. Based on the diversity of error distributions, an effective method for distinguishing and diagnosing the error sources is proposed and verified by an elaborative designed simulation. In the actual comparison experiment, vibration, phase-shift error and intensity fluctuation were imposed to demonstrate this method. The results showed that this method can be applied into the real-time measurement and provide an in situ diagnosing technique.
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收藏
页数：12
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