Hot electron emission from insulators under electron-beam processing.

被引：0
|
作者：
Filachev, AM [1 ]
Fouks, BI [1 ]
Greenfield, DE [1 ]
机构：
[1] Sci & Res Inst Electron & Ion Opt, Moscow 111538, Russia
来源：
FOURTH ALL-RUSSIAN SEMINAR ON PROBLEMS OF THEORETICAL AND APPLIED ELECTRON OPTICS | 2000年 / 4187卷
关键词：
emission; electron-beam processing; dielectrics; hot electrons; hole-electron pairs; trapped space charge;
D O I：
10.1117/12.394148
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The experimental study of charge relaxation while electron beam processing of dielectrics has shown that under irradiation with an intensive and concentrated electron beam some dielectrics reveal strange behavior. The electron emission from their surface much exceeds the value expected from the conventional theory of the secondary electron emission Morewer, the time dependence of the emission current is quite different. The measured emission current changes rapidly with time and, under some circumstances, oscillates while the secondary emission is always proportional to the electron beam's current The target of the present paper is to construct the physical model of this effect employing the theory of hot electrons.
引用
收藏
页码：86 / 93
页数：8
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