Defining the parameters of a cantilever tip AFM by reference structure

被引：15
|
作者：
Bykov, VA
Novikov, YA
Rakov, A
Shikin, SM
机构：
[1] Russian Acad Sci, Inst Gen Phys, Moscow 119991, Russia
[2] Nanotechnol MDT, Moscow, Russia
来源：
ULTRAMICROSCOPY | 2003年 / 96卷 / 02期
关键词：
atomic force microscope; AFM; dimensional metrology; cantilever; tip characterization;
D O I：
10.1016/S0304-3991(03)00005-6
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A method of measurement and control of atomic force microscope (AFM) probe parameters is offered. The AFM real cantilever parameters are defined. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：175 / 180
页数：6
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