Measurement of surface acoustic wave on a quartz ball with proximate electrodes to improve performance of ball surface acoustic wave device

被引:8
|
作者
Kai, Satoshi [1 ]
Ote, Kazunori
Mihara, Tsuyoshi
Ohgi, Tsuneo
Nakaso, Noritaka
Satoh, Ichitaro
Fukiura, Takeshi
Tanaka, Hidekazu
Yamanaka, Kazushi
机构
[1] Tohoku Univ, Grad Sch Engn, Dept Mat Proc, Sendai, Miyagi 9808579, Japan
[2] Toppan Printing Co Ltd, Sugito, Saitama 3458508, Japan
[3] Yamatake Corp, Kanagawa 2518522, Japan
关键词
ball SAW sensor; surface acoustic wave; surface wave velocity; interdigital transducer; orientation control apparatus;
D O I
10.1143/JJAP.46.4723
中图分类号
O59 [应用物理学];
学科分类号
摘要
In order to improve the performance of ball surface acoustic wave (SAW) devices, we have developed an orientation control apparatus to find the Z axis of a quartz crystal ball by an optical birefringence measurement, and to find the X and Y axes by measuring the propagation characteristics of a SAW using an interdigital transducer (IDT), which is moved close to the ball using a translation stage. The soft spring of the vacuum chuck of the ball manipulator prevented damage to the ball or IDT during the contact. The concave shape of the bail holder of the chuck enabled repeatable alignment of the ball center and the manipulator axis. As a preliminary result, we confirmed that the SAW velocity variation had 60 degrees periodicity and succeeded in identifying the - Y axis-equivalent direction on the quartz ball.
引用
收藏
页码:4723 / 4725
页数:3
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