The Development of X-ray Fluorescence Spectrometer Based on Energy Dispersion

Compared with other element content measurement methods, Energy Dispersive X-ray Fluorescence spectrometer (EDXRFS) has the following advantages: nondestructive testing, multi-element fast analysis, high accuracy and no pollution. It has been applied in the fields of production quality control, ecological environment monitoring, geological survey, medical food inspection and element analysis. In this paper, the EDXRFS hardware platform is presented based on theoretical analysis of energy dispersive X-ray, including power supply subsystem, optical subsystem, control subsystem and PC. Then, spectrum analyses including qualitative analysis and quantitative analysis are made by PC to get the categories and contents of elements in samples. Finally, experiments were carried out to measure the contents of Cu and Zn. The precision of the element content measurement is lower than 3%.