Study on the Fabrication and Cutting Performance of HFCVD Diamond Coated Silicon Nitride Inserts

被引:1
|
作者
Yang, Guodong [1 ]
Shen, Bin [1 ]
Sun, Fanghong [1 ]
Zhang, Zhiming [1 ]
Chen, Ming [1 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai 200030, Peoples R China
关键词
HFCVD; Silicon nitride insert; Cutting performance; TOOLS; BEHAVIOR; FILMS; CVD;
D O I
10.4028/www.scientific.net/KEM.431-432.515
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Microcrystalline diamond (MCD) and fine-grained diamond (FGD) films are deposited on silicon nitride (Si(3)N(4)) inserts using the hot filament chemical vapor deposition (HFCVD) method. Scanning electron microscope (SEM), X -ray diffraction (XRD) and Raman spectrum are employed to characterize these as-deposited diamond films. Cutting performance of as-fabricated CVD diamond coated Si(3)N(4) inserts is examined in dry turning glass fiber reinforced plastics (GFRP) material, comparing with the uncoated Si(3)N(4) inserts. The results indicate that the tool failure is mainly attributed to its severe flank wear, which is caused by continuous friction and impact brought by many hard SiO(2) particles distributed in the GFPR work piece. The lifetime of Si(3)N(4) inserts can be prolonged by depositing MCD or FGD films on them and the FGD coated insert shows better wear resistance than the MCD coated one.
引用
收藏
页码:515 / 518
页数:4
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