Effect of the substrate material on diamond CVD coating properties

被引：18
|
作者：
Ristic, GS
Bogdanov, ZD
Zec, S
Romcevic, N
Dohcevic-Mitrovic, Z
Miljanic, SS
机构：
[1] VINCA, Inst Sci Nucl, YU-11001 Belgrade, Serbia
[2] Inst Phys, YU-11080 Belgrade, Serbia
[3] Univ Belgrade, Fac Phys Chem, YU-11001 Belgrade, Serbia
来源：
MATERIALS CHEMISTRY AND PHYSICS | 2003年 / 80卷 / 02期
关键词：
chemical vapor deposition; diamond coating; substrate material effect; substrates; Mo; WC-Co; Si; Cu;
D O I：
10.1016/S0254-0584(03)00094-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Diamond coatings were deposited onto different substrates (Cu, Si, WC-Co, Mo) by hot-filament chemical vapor deposition (CVD). Characterization of the obtained coatings was performed using scanning electron microscopy (SEM), X-ray diffraction (XRD) analysis, Raman spectroscopy and Fourier transform infrared reflection (FTIR) spectroscopy. The results and observed differences are discussed from the aspect of the chemical nature of the substrate and its reactivity with a gaseous medium. 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：529 / 536
页数：8
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