Short-Time Discrete Wavelet Transform for Wafer Microcrack Detection

被引：0
|
作者：
Yang, Wen-Ren [1 ]
机构：
[1] Changhua Univ Educ, Dept Elect Engn, Changhua, Taiwan
来源：
ISIE: 2009 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS | 2009年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents design and proof-of-principle experiments for a real-time in-line wafer microcrack detection system. The line-scanning method is chosen because entire wafer can be inspected without image processing technology. Short-Time Discrete Wavelet Transform (STDWT) is developed in order to determine reflective characteristics of microcrack, and smaller computation complexity in order to shorten system resolving time.
引用
收藏
页码：2046 / 2051
页数：6
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