AI Solution for Metrology Recipe Automation

被引：0
|
作者：
Zhou, Congshu [1 ]
Zou, Zheng [2 ]
Li, Fang [2 ]
Lim, Seng Keat [2 ]
Khaw, Jason [1 ]
Boo, Summer [1 ]
Lam, Hein Mun [1 ]
机构：
[1] GlobalFoundries Singapore, Yield Enhancement, Singapore, Singapore
[2] Globalfoundries Singapore, Metrol, Singapore, Singapore
来源：
2021 32ND ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) | 2021年
关键词：
Metrology Recipe Automation; wafer less recipe; wafer map sampling; measurement sites auto grouping;
D O I：
10.1109/ASMC51741.2021.9435689
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The proposed paper presents the use of Artificial Intelligence (AI) as a solution to perform wafer map sampling and measurement points' coordinates extraction for Metrology recipe automation in a wafer fab. This solution greatly improves fab operation efficiency and reliability by reducing engineering time while also providing systematic data for downstream analyses. In this paper we use AI solution to solve the
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页数：4
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